Characteristics of Nafion Membranes with Pd Thin Films Deposited by DC Magnetron Sputtering Technique
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چکیده
منابع مشابه
AlNXOY THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING
AlNxOy thin films were produced by DC reactive magnetron sputtering, using an atmosphere of argon and a reactive gas mixture of nitrogen and oxygen, for a wide range of partial pressures of reactive gas. During the deposition, the discharge current was kept constant and the discharge parameters were monitored. The deposition rate, chemical composition, morphology, structure and electrical resis...
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ژورنال
عنوان ژورنال: Journal of the Korean Electrochemical Society
سال: 2002
ISSN: 1229-1935
DOI: 10.5229/jkes.2002.5.2.068